Low-Loss Millimeter-Length Waveguides and Grating Couplers in Single-Crystal Diamond
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چکیده
منابع مشابه
Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique
We report low-loss silicon waveguides and efficient grating coupler to couple light into them. By using anisotropic wet etching technique, we reduced the side wall roughness down to 1.2 nm. The waveguides were patterned along the [112] direction on a [110] silicon-on-insulator substrate. The waveguide boundaries are decided by the [111] planes, which are normal to the [110] surface. Fabricated ...
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ژورنال
عنوان ژورنال: Journal of Lightwave Technology
سال: 2016
ISSN: 0733-8724,1558-2213
DOI: 10.1109/jlt.2016.2622620